Title :
Characteristics of electromechanical solid state multilayer actuators
Author :
Pertsch, P. ; Pan, M.-J. ; Vedula, V.R. ; Yoshikawa, S. ; Park, S.-E. ; Shrout, Thomas R.
Author_Institution :
Fraunhofer Inst. for Appl. Opt. & Precision Eng., Jena, Germany
Abstract :
In this study we compare the responses of stacked actuators made of “soft” ferroelectrics to those of less common materials such as electrostrictive and antiferroelectric to ferroelectric phase-switching ceramics. The same measurements were performed on various samples which were identical in size and manufacturing technology. The latest material results on relaxor-based single crystals were considered to give a more comprehensive overview. Additionally, we discussed the clamping effects caused by the actuator structure, which have to be taken into account comparing the stack results to pure material response
Keywords :
electrostriction; ferroelectric ceramics; ferroelectric devices; ferroelectric switching; multilayers; piezoceramics; piezoelectric actuators; reviews; antiferroelectric-ferroelectric phase-switching ceramics; clamping effects; electromechanical solid state multilayer actuators; electrostrictive ceramics; relaxor-based single crystals; response; soft ferroelectrics; stacked actuators; Actuators; Ceramics; Crystalline materials; Electrostriction; Ferroelectric materials; Manufacturing; Nonhomogeneous media; Performance evaluation; Size measurement; Solid state circuits;
Conference_Titel :
Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on
Conference_Location :
Montreux
Print_ISBN :
0-7803-4959-8
DOI :
10.1109/ISAF.1998.786757
