Characteristics of electromechanical solid state multilayer actuators

Author

Pertsch, P. ; Pan, M.-J. ; Vedula, V.R. ; Yoshikawa, S. ; Park, S.-E. ; Shrout, Thomas R.

Author_Institution

Fraunhofer Inst. for Appl. Opt. & Precision Eng., Jena, Germany

fYear

1998

fDate

1998

Firstpage

571

Lastpage

574

Abstract

In this study we compare the responses of stacked actuators made of “soft” ferroelectrics to those of less common materials such as electrostrictive and antiferroelectric to ferroelectric phase-switching ceramics. The same measurements were performed on various samples which were identical in size and manufacturing technology. The latest material results on relaxor-based single crystals were considered to give a more comprehensive overview. Additionally, we discussed the clamping effects caused by the actuator structure, which have to be taken into account comparing the stack results to pure material response

Keywords

electrostriction; ferroelectric ceramics; ferroelectric devices; ferroelectric switching; multilayers; piezoceramics; piezoelectric actuators; reviews; antiferroelectric-ferroelectric phase-switching ceramics; clamping effects; electromechanical solid state multilayer actuators; electrostrictive ceramics; relaxor-based single crystals; response; soft ferroelectrics; stacked actuators; Actuators; Ceramics; Crystalline materials; Electrostriction; Ferroelectric materials; Manufacturing; Nonhomogeneous media; Performance evaluation; Size measurement; Solid state circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on

Conference_Location

Montreux

ISSN

1099-4734

Print_ISBN

0-7803-4959-8

Type

conf

DOI

10.1109/ISAF.1998.786757

Filename

786757