Title :
A 3.7/spl times/3.7 /spl mu/m/sup 2/ square pixel CMOS image sensor for digital still camera application
Author :
Ihara, H. ; Yamashita, H. ; Inoue, I. ; Yamaguchi, T. ; Nakamura, N. ; Nozaki, H.
Author_Institution :
Toshiba Corp., Kawasaki, Japan
Abstract :
Systems such as digital still cameras, robots, etc. require low-cost, low-power and high-resolution. This CMOS image sensor has reduced cell size. The sensor is fabricated using 0.6 /spl mu/m, triple-poly-silicon, double-metal CMOS process technology. The sensor has 3.7/spl times/3.7 /spl mu/m/sup 2/ pixels. It operates with one 3.3V power supply and has less than 30mW power dissipation.
Keywords :
CMOS integrated circuits; 0.6 micron; 3.3 V; 3.7 micron; 30 mW; CMOS image sensor; Si; cell size; digital still camera application; double-metal CMOS process; power dissipation; resolution; square pixel; triple-poly-silicon process; CMOS image sensors; CMOS process; Capacitance; Contacts; Dark current; Digital cameras; Electrodes; Pixel; Robot vision systems; Voltage;
Conference_Titel :
Solid-State Circuits Conference, 1998. Digest of Technical Papers. 1998 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-4344-1
DOI :
10.1109/ISSCC.1998.672427
