Title :
Reactive ion beam etching of superconducting Bi2212 by Ta/PR and PR´/Ta/PR masks for the generation of THz waves
Author :
Koseoglu, H. ; Turkoglu, F. ; Demirhan, Y. ; Meric, Z. ; Ozyuzer, L.
Author_Institution :
Dept. of Phys., Izmir Inst. Technol., Izmir, Turkey
fDate :
Nov. 3 2009-Oct. 6 2009
Abstract :
Generation of powerful THz radiation from intrinsic Josephson Junctions (IJJs) of Bi2Sr2CaCu2O8+¿ (Bi2212) may require mesas with large lateral dimension. However, there are difficulties in fabrication of perfect rectangular mesas. Mesa lateral angles should be close to 90 degrees to obtain IJJs with same planar dimensions for synchronization of IJJs. Since thick photoresist (PR) layer shades the lateral dimension of mesa during ion beam etching, we patterned Ta/PR and PR´/Ta/PR masks on Bi2212 and used selective ion etching to overcome this problem. The reactive ion beam etchings have done with ion beam of Ar, N2 and O2 and we have obtained mesas about 1 ¿m with lateral angle of approximately 50 to 75° which is better than the mesas fabricated with single layer mask.
Keywords :
Josephson effect; argon; bismuth compounds; calcium compounds; copper compounds; etching; high-temperature superconductors; ion beam effects; nitrogen; oxygen; strontium compounds; terahertz wave generation; Ar; Bi2Sr2CaCu2O8+¿; N2; O2; THz radiation; intrinsic Josephson junctions; mesa lateral angles; photoresist layer shades; reactive ion beam etching; rectangular mesas fabrication; single layer mask; superconducting; terahertz wave generation; Electromagnetic scattering; Etching; Frequency; Gold; Ion beams; Josephson junctions; Physics; Plasma temperature; Power generation; Superconducting microwave devices;
Conference_Titel :
Terahertz and Mid Infrared Radiation: Basic Research and Practical Applications, 2009. TERA-MIR 2009. International Workshop
Conference_Location :
Turunc-Marmaris
Print_ISBN :
978-1-4244-3848-8
Electronic_ISBN :
98-1-4244-3849-5
DOI :
10.1109/TERAMIR.2009.5379642
