Title :
Femtosecond three dimensional holographic lithography using CGH displayed on SLM
Author :
Fauzi, A. Anas ; Kim, B. Sung-Jin ; Kim, C. Nam ; Jun, D. Seock-Hee ; Lee, E. Kwon-Yeon
Author_Institution :
Sch. of Electr. & Comput. Eng., Chungbuk Nat. Univ., Cheongju, South Korea
Abstract :
Holographic three dimensional photolithography was demonstrated in this paper. The femtosecond laser pulse duration provide higher resolution and more effective for single shot pattern transfer, due to larger peak powers that generate larger photonic concentration at beam focus. A computer generated hologram (CGH) created with optimal-rotation-angle (ORA) method will increase the uniformity of the diffraction peaks. To verify this method, simulation is conducted using MATLAB.
Keywords :
computer-generated holography; holography; light diffraction; photolithography; CGH displayed on SLM; MATLAB; beam focus; computer generated hologram; diffraction peaks; femtosecond laser pulse; femtosecond three dimensional holographic lithography; higher resolution; holographic three dimensional photolithography; optimal-rotation-angle method; photonic concentration; single shot pattern transfer; Diffraction; Holographic optical components; Holography; Laser beams; Lithography; Optical pulses; Ultrafast optics;
Conference_Titel :
Opto-Electronics and Communications Conference (OECC), 2012 17th
Conference_Location :
Busan
Print_ISBN :
978-1-4673-0976-9
Electronic_ISBN :
2166-8884
DOI :
10.1109/OECC.2012.6276791
