Femtosecond three dimensional holographic lithography using CGH displayed on SLM

Author

Fauzi, A. Anas ; Kim, B. Sung-Jin ; Kim, C. Nam ; Jun, D. Seock-Hee ; Lee, E. Kwon-Yeon

Author_Institution

Sch. of Electr. & Comput. Eng., Chungbuk Nat. Univ., Cheongju, South Korea

fYear

2012

fDate

2-6 July 2012

Firstpage

685

Lastpage

686

Abstract

Holographic three dimensional photolithography was demonstrated in this paper. The femtosecond laser pulse duration provide higher resolution and more effective for single shot pattern transfer, due to larger peak powers that generate larger photonic concentration at beam focus. A computer generated hologram (CGH) created with optimal-rotation-angle (ORA) method will increase the uniformity of the diffraction peaks. To verify this method, simulation is conducted using MATLAB.

Keywords

computer-generated holography; holography; light diffraction; photolithography; CGH displayed on SLM; MATLAB; beam focus; computer generated hologram; diffraction peaks; femtosecond laser pulse; femtosecond three dimensional holographic lithography; higher resolution; holographic three dimensional photolithography; optimal-rotation-angle method; photonic concentration; single shot pattern transfer; Diffraction; Holographic optical components; Holography; Laser beams; Lithography; Optical pulses; Ultrafast optics;

fLanguage

English

Publisher

ieee

Conference_Titel

Opto-Electronics and Communications Conference (OECC), 2012 17th

Conference_Location

Busan

ISSN

2166-8884

Print_ISBN

978-1-4673-0976-9

Electronic_ISBN

2166-8884

Type

conf

DOI

10.1109/OECC.2012.6276791

Filename

6276791