• DocumentCode
    3082885
  • Title

    Fabrication of black silicon by using RIE texturing process as metal mesh

  • Author

    Kong, Daeyoung ; Oh, Junghwa ; Jeon, Seongchan ; Kim, Bonghwan ; Cho, Chanseob ; Lee, Jonghyun

  • Author_Institution
    Sch. of Electron. Eng., Kyungpook Nat. Univ., Daegu, South Korea
  • fYear
    2012
  • fDate
    2-6 July 2012
  • Firstpage
    697
  • Lastpage
    698
  • Abstract
    The reduction of optical losses in crystalline silicon solar cell by surface texturing is a critical process to improve the efficiency. We have changed the nonocolumn structure on the micrometer pyramidal structure by RIE texturing.
  • Keywords
    elemental semiconductors; optical losses; silicon; solar cells; sputter etching; surface texture; RIE texturing; Si; black silicon; metal mesh; micrometer pyramidal structure; nonocolumn structure; optical losses; solar cell; surface texturing; Conferences;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Opto-Electronics and Communications Conference (OECC), 2012 17th
  • Conference_Location
    Busan
  • ISSN
    2166-8884
  • Print_ISBN
    978-1-4673-0976-9
  • Electronic_ISBN
    2166-8884
  • Type

    conf

  • DOI
    10.1109/OECC.2012.6276797
  • Filename
    6276797
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3082885