The teaching of microelectromechanical systems (MEMS)

Author

Zaghloul, Mona E. ; Nagel, David J.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., George Washington Univ., Washington, DC, USA

fYear

1999

fDate

1999

Firstpage

92

Lastpage

93

Abstract

MEMS technology is now where integrated circuit technology was about 30 years ago. It is clearly going to be pervasively important. Both commercial volume and patents on MEMS are growing at rates exceeding 20% annually. The teaching of MEMS technology, now in its early stages, must keep pace. Most universities with an engineering program will have to teach MEMS technology starting within the next decade. This paper summarizes the state of the MEMS instruction regarding available texts and other materials, and especially current short courses and ordinary university courses. Two courses on the production and applications of MEMS, which are planned for the George Washington University (USA) in the coming academic year, are outlined. Possibilities for laboratory courses on MEMS are also presented

Keywords

educational courses; electronic engineering education; laboratories; micromechanical devices; student experiments; MEMS technology; applications; engineering education programmes; instruction; laboratory courses; microelectromechanical systems teaching; production; short courses; texts; universities; university courses; Biomedical optical imaging; Education; Etching; Integrated circuit technology; Laboratories; Microelectromechanical systems; Micromechanical devices; Optical sensors; Production; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Systems Education, 1999. MSE'99. IEEE International Conference on

Conference_Location

Arlington, VA

Print_ISBN

0-7695-0312-8

Type

conf

DOI

10.1109/MSE.1999.787054

Filename

787054