Title : 
An investigation of CeO2 based ReRAM with p+ and n+-Si bottom electrodes
         
        
            Author : 
Jin, J. ; Kakushima, K. ; Kataoka, Y. ; Nishiyama, A. ; Sugii, N. ; Wakabayashi, H. ; Tsutsui, K. ; Natori, K. ; Iwai, H.
         
        
            Author_Institution : 
Tokyo Tech. FRC, Tokyo, Japan
         
        
        
        
        
        
            Abstract : 
In this paper we use the p+-Si and n+-Si as bottom electrode for CeO2 based ReRAM. The work function difference between p+-Si and n+-Si substrate gives out an about 0.6 V shift of the set and reset voltage. The mechanism of this shift was investigated and the set and reset of voltage with pulse width dependence was also concerned depends on p+-Si substrate.
         
        
            Keywords : 
cerium compounds; electrodes; resistive RAM; silicon; CeO2; ReRAM; Si; bottom electrode; pulse width dependence; reset voltage; resistive random access memory; set voltage; Electric potential; Electrodes; Histograms; Programming; Reliability; Substrates;
         
        
        
        
            Conference_Titel : 
Semiconductor Technology International Conference (CSTIC), 2015 China
         
        
            Conference_Location : 
Shanghai
         
        
        
        
            DOI : 
10.1109/CSTIC.2015.7153330