Title :
Impact of substrate resistivity on the high frequency performance of metal interconnect
Author :
Jenei, S. ; Kol´dyaev, V. ; Decoutere, S. ; Kuhn, R. ; Deferm, L.
Author_Institution :
IMEC, Leuven, Belgium
Abstract :
Substrate effects have a major impact on the high frequency performance of interconnects. This paper discusses the impact of the substrate resistivity on the frequency dependence of the intermetal capacitance and mutual inductance, and on the effective metal resistance. The relative importance of this frequency dependence is discussed. As an example, the significance of these effects for on-chip spiral inductors are also demonstrated
Keywords :
capacitance; electric resistance; electrical resistivity; inductance; inductors; integrated circuit interconnections; integrated circuit metallisation; effective metal resistance; frequency dependence; high frequency performance; intermetal capacitance; metal interconnect; mutual inductance; on-chip spiral inductors; substrate effects; substrate resistivity; Capacitance; Conductivity; Dielectric substrates; Equations; Frequency dependence; Inductance; Inductors; Integrated circuit interconnections; Skin effect; Spirals;
Conference_Titel :
Interconnect Technology, 1999. IEEE International Conference
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-5174-6
DOI :
10.1109/IITC.1999.787133
