DocumentCode
3085822
Title
Impact of substrate resistivity on the high frequency performance of metal interconnect
Author
Jenei, S. ; Kol´dyaev, V. ; Decoutere, S. ; Kuhn, R. ; Deferm, L.
Author_Institution
IMEC, Leuven, Belgium
fYear
1999
fDate
1999
Firstpage
242
Lastpage
244
Abstract
Substrate effects have a major impact on the high frequency performance of interconnects. This paper discusses the impact of the substrate resistivity on the frequency dependence of the intermetal capacitance and mutual inductance, and on the effective metal resistance. The relative importance of this frequency dependence is discussed. As an example, the significance of these effects for on-chip spiral inductors are also demonstrated
Keywords
capacitance; electric resistance; electrical resistivity; inductance; inductors; integrated circuit interconnections; integrated circuit metallisation; effective metal resistance; frequency dependence; high frequency performance; intermetal capacitance; metal interconnect; mutual inductance; on-chip spiral inductors; substrate effects; substrate resistivity; Capacitance; Conductivity; Dielectric substrates; Equations; Frequency dependence; Inductance; Inductors; Integrated circuit interconnections; Skin effect; Spirals;
fLanguage
English
Publisher
ieee
Conference_Titel
Interconnect Technology, 1999. IEEE International Conference
Conference_Location
San Francisco, CA
Print_ISBN
0-7803-5174-6
Type
conf
DOI
10.1109/IITC.1999.787133
Filename
787133
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