DocumentCode :
3086222
Title :
Structure properties of GaN1-xPx ternary alloys grown by metal-organic chemical vapor deposition
Author :
Chen, D.J. ; Shen, B. ; Xu, F.J. ; Tao, Y.Q. ; Zhang, R. ; Shi, Y. ; Zheng, Y.D.
Author_Institution :
Jiangsu Provincial Key Lab. of Photonic & Electron. Mater. Sci. & Technol., Nanjing Univ., China
fYear :
2004
fDate :
15-16 March 2004
Firstpage :
206
Lastpage :
209
Abstract :
GaN-rich side of GaN1-xPx ternary alloys have been successfully synthesized by light-radiation heating and low-pressure metal-organic chemical vapor deposition. The Ga 3d and P 2p core level peaks of the GaN1-xPx films show that P atoms in GaN1-xPx do partly occupy the N site but also is incorporated as interstitials of GaN1-xPx by means of X-ray photoelectron spectroscopy. X-ray diffraction spectra show that the (0002) peak of GaN1-xPx shifts to smaller angle with increasing P composition and the GaN1-xPx films are still of a typical hexagonal structure. The Raman spectra of GaN1-xPx films, recorded in backscattering geometry, exhibit four new vibrational modes at 256, 314, 377 and 428 cm-1 compared with an undoped GaN sample. Those modes are assigned to the so called quasi-local mode induced by P in GaN, disorder-activated scattering and gap modes related to the Ga-P bond vibrations, respectively.
Keywords :
III-V semiconductors; MOCVD coatings; Raman spectra; X-ray diffraction; X-ray photoelectron spectra; core levels; gallium compounds; interstitials; semiconductor growth; semiconductor thin films; wide band gap semiconductors; 256 cm-1; 314 cm-1; 377 cm-1; 428 cm-1; Ga-P bond vibrations; GaN1-xPx; Raman spectra; X-ray diffraction spectra; X-ray photoelectron spectroscopy; backscattering geometry; core level; disorder-activated scattering; gap modes; hexagonal structure; interstitials; metal-organic chemical vapor deposition; vibrational modes; Atomic layer deposition; Backscatter; Chemical vapor deposition; Gallium nitride; Geometry; Heating; Light scattering; Raman scattering; Spectroscopy; X-ray diffraction;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Junction Technology, 2004. IWJT '04. The Fourth International Workshop on
Print_ISBN :
0-7803-8191-2
Type :
conf
DOI :
10.1109/IWJT.2004.1306795
Filename :
1306795
Link To Document :
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