Title :
Threshold behavior of the drift region: The missing piece in LDMOS modeling
Author :
Sque, S.J. ; Scholten, A.J. ; Aarts, A.C.T. ; Klaassen, D.B.M.
Author_Institution :
NXP Semicond., Eindhoven, Netherlands
Abstract :
One of the greatest remaining difficulties in the compact modeling of LDMOS devices is the modeling of the peaks that appear in the capacitance-voltage characteristics when such devices are operated in the on-state. The link between the on-state capacitance peaks and the potential at the internal drain is explored using TCAD simulations and mathematical analysis. The shortcomings of the existing LDMOS compact models are explained using a sub-circuit analysis of the channel and driftregion components of these models. The results of a TCAD-based investigation into how the channel and drift-region parts of an LDMOS behave, interact, and together determine the potential at the internal drain are presented. An improved LDMOS compact-modeling approach is proposed, and the results of a proof-of-concept model are presented and shown to be better than those from existing models, with comparisons made using both simulated and measured device data.
Keywords :
MOSFET; mathematical analysis; network analysis; semiconductor device models; LDMOS devices; LDMOS modeling; TCAD simulations; capacitance-voltage characteristics; channel components; compact modeling; drift region components; internal drain; mathematical analysis; missing piece; on-state capacitance; sub-circuit analysis; threshold behavior; Analytical models; Capacitance; Data models; Electric potential; Integrated circuit modeling; Logic gates; Mathematical model;
Conference_Titel :
Electron Devices Meeting (IEDM), 2013 IEEE International
Conference_Location :
Washington, DC
DOI :
10.1109/IEDM.2013.6724619