Title :
The approaching of capacitance-voltage measurement toward real-world nano-device
Author :
LiLung Lai ; Nan Li ; Zhang, Oscar
Author_Institution :
Semicond. Manuf. Int. (Shanghai) Corp., Shanghai, China
Abstract :
Owing to the advancing development of electrical technique in analytical laboratory, we already have capability to measure tiny capacitance, down to 100aF, in Nano-dimension, down to 20nm, of the real-world Nano-device using Nanoprobing in SEM or AFM instead of traditional Micro-probing in OM instrument become real of the claim. The mechanism, operation and application are described and discussed in the content.
Keywords :
capacitance measurement; integrated circuit measurement; nanoelectronics; scanning electron microscopy; transmission electron microscopy; voltage measurement; AFM; OM instrument; SEM; analytical laboratory; atomic force microscopy; capacitance-voltage measurement; electrical technique; microprobing; nanoprobing; real-world nanodevice; scanning electron microscopy; Capacitance; Capacitance-voltage characteristics; Current measurement; Imaging; Logic gates; Probes; Testing;
Conference_Titel :
Semiconductor Technology International Conference (CSTIC), 2015 China
Conference_Location :
Shanghai
DOI :
10.1109/CSTIC.2015.7153454
