Title :
Demonstration of a single-chip integrated MEMS tunable laser with a large wavelength tuning range
Author :
Cai, H. ; Tao, J.F. ; Gu, Yuan Dong ; Kwong, D.L. ; Liu, A.Q.
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
This paper presents an on-chip miniaturized MEMS tunable laser, with a 3-dimensional micro coupling system to improve the coupling efficiency and side mode suppression radio. The prototype is fabricated on an SOI wafer by DRIE process. It obtains a coupling efficiency as high as 76.5%. It offers an improved tuning over a range of 48 nm. Compared with other hybrid-integrated tunable lasers, the compact MEMS tunable laser has merits as fast tuning speed, large tuning range, and a single-chip solution.
Keywords :
etching; integrated optoelectronics; laser modes; laser tuning; micro-optomechanical devices; microfabrication; optical fabrication; prototypes; silicon-on-insulator; 3-dimensional microcoupling; DRIE process; SOI wafer; Si; coupling efficiency; on-chip miniaturized MEMS tunable laser; prototype; side mode suppression radio; single-chip integrated MEMS tunable laser; wavelength 48 nm; wavelength tuning; Couplings; Laser tuning; Lenses; Micromechanical devices; Mirrors; Optical fibers;
Conference_Titel :
Electron Devices Meeting (IEDM), 2013 IEEE International
Conference_Location :
Washington, DC
DOI :
10.1109/IEDM.2013.6724656
