DocumentCode :
3088838
Title :
Thick film metallization of AlN substrate with Cu conductive pastes
Author :
Chiou, B.S. ; Young, C.D.
Author_Institution :
Nat. Chiao Tung Univ., Hsinchu, Taiwan
fYear :
1992
fDate :
18-20 May 1992
Firstpage :
692
Lastpage :
699
Abstract :
Metallization of AlN substrate is employed with Cu conductive pastes through a thick-film screen printing process. The morphological development of the conductive/substrate interface and the element distribution of the compound precipitates are investigated with the aid of electron microscopy and X-ray diffraction. For higher sintering temperature paste Cu 1, the reaction of PbO2 and W forms PbWO 4 and results in the reduction of Cu2O to metallic Cu. The as-sintered Cu 1 metallized specimen exhibits higher adhesion strength than the lower sintered Cu 2 specimen. It is argued that the more highly densified film morphology, the compound formation, and mechanical interlocking are the major factors in the enhancement of the adhesion strength. It is also observed that the sintering atmosphere has a significant effect on the distribution of the morphological development of precipitates near the conductive/substrate interface
Keywords :
X-ray diffraction examination of materials; adhesion; aluminium compounds; ceramics; copper; hybrid integrated circuits; interface structure; metallisation; packaging; scanning electron microscope examination of materials; sintering; substrates; thick film circuits; AlN substrate; AlN-Cu; Cu conductive paste; PbWO4; X-ray diffraction; adhesion strength; conductive/substrate interface; electron microscopy; element distribution; mechanical interlocking; morphological development; precipitates; sintering atmosphere; thick film metallisation; thick-film screen printing process; Adhesives; Atmosphere; Electron microscopy; Metallization; Morphology; Printing; Substrates; Temperature; Thick films; X-ray diffraction;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Components and Technology Conference, 1992. Proceedings., 42nd
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-0167-6
Type :
conf
DOI :
10.1109/ECTC.1992.204280
Filename :
204280
Link To Document :
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