• DocumentCode
    3088838
  • Title

    Thick film metallization of AlN substrate with Cu conductive pastes

  • Author

    Chiou, B.S. ; Young, C.D.

  • Author_Institution
    Nat. Chiao Tung Univ., Hsinchu, Taiwan
  • fYear
    1992
  • fDate
    18-20 May 1992
  • Firstpage
    692
  • Lastpage
    699
  • Abstract
    Metallization of AlN substrate is employed with Cu conductive pastes through a thick-film screen printing process. The morphological development of the conductive/substrate interface and the element distribution of the compound precipitates are investigated with the aid of electron microscopy and X-ray diffraction. For higher sintering temperature paste Cu 1, the reaction of PbO2 and W forms PbWO 4 and results in the reduction of Cu2O to metallic Cu. The as-sintered Cu 1 metallized specimen exhibits higher adhesion strength than the lower sintered Cu 2 specimen. It is argued that the more highly densified film morphology, the compound formation, and mechanical interlocking are the major factors in the enhancement of the adhesion strength. It is also observed that the sintering atmosphere has a significant effect on the distribution of the morphological development of precipitates near the conductive/substrate interface
  • Keywords
    X-ray diffraction examination of materials; adhesion; aluminium compounds; ceramics; copper; hybrid integrated circuits; interface structure; metallisation; packaging; scanning electron microscope examination of materials; sintering; substrates; thick film circuits; AlN substrate; AlN-Cu; Cu conductive paste; PbWO4; X-ray diffraction; adhesion strength; conductive/substrate interface; electron microscopy; element distribution; mechanical interlocking; morphological development; precipitates; sintering atmosphere; thick film metallisation; thick-film screen printing process; Adhesives; Atmosphere; Electron microscopy; Metallization; Morphology; Printing; Substrates; Temperature; Thick films; X-ray diffraction;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Components and Technology Conference, 1992. Proceedings., 42nd
  • Conference_Location
    San Diego, CA
  • Print_ISBN
    0-7803-0167-6
  • Type

    conf

  • DOI
    10.1109/ECTC.1992.204280
  • Filename
    204280