Title :
High performance amorphous metal-oxide semiconductors thin-film passive and active pixel sensors
Author :
Rui Zhang ; Linsen Bie ; Tze-Ching Fung ; Yu, Eric Kai-Hsiang ; Chumin Zhao ; Kanicki, J.
Author_Institution :
Solid-state Electron. Lab., Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
In this paper, for the first time, we report on high performance amorphous In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs) based passive pixel sensor (PPS) and active pixel sensor (APS) circuits. Experimental results show that single-TFT PPS with a pitch length of 50μm can achieve a signal charge gain approaching to unity (Gain=0.93) under a fast readout time of 20μs and a dynamic range of 40dB. APS based on three a-IGZO TFTs, with a pitch length of ~100μm, established a high dynamic range of more than 60dB. 2-TFTs half active pixel sensor (H-APS) testing circuits are also designed to investigate the voltage gain (AV=ΔVOUT/ΔVG) properties for the APS circuit in this work. For the a-IGZO APS, AV is measured to be ~1.25, and through normalization of the pixel capacitance (CPIX) to a common value of 5pF, a large signal charge gain of 25 is obtained.
Keywords :
amorphous semiconductors; integrated circuit testing; thin film sensors; thin film transistors; H-APS testing circuits; InGaZnO; PPS; a-IGZO TFT; active pixel sensors; amorphous InGaZnO; amorphous metal-oxide semiconductors; capacitance 5 pF; half active pixel sensor; normalization; passive pixel sensors; pixel capacitance; thin film transistors; thin-film sensors; time 20 mus; Active pixel sensors; Capacitors; Current measurement; Dynamic range; Glass; Testing; Thin film transistors;
Conference_Titel :
Electron Devices Meeting (IEDM), 2013 IEEE International
Conference_Location :
Washington, DC
DOI :
10.1109/IEDM.2013.6724703