DocumentCode
3089226
Title
Analysis of Beam Collimation Data from Field-Emitter Arrays with Linear Planar Lens
Author
Tang, C.-M. ; Swyden, T.A.
fYear
1996
fDate
3-5 June 1996
Firstpage
254
Abstract
Summary form only given. Discusses emission and beam collimation data from silicon field-emit,ter arrays with inrieperidently controlled planar lenses. The devices were fabricated by MCNC in two geometries: a row of 100 tips and two rows of emitters each with 100 tips.
Keywords
Charge coupled devices; Charge-coupled image sensors; Collimators; Focusing; Geometry; Laboratories; Lenses; Scanning electron microscopy; Silicon; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1996. IEEE Conference Record - Abstracts., 1996 IEEE International Conference on
Conference_Location
Boston, MA, USA
ISSN
0730-9244
Print_ISBN
0-7803-3322-5
Type
conf
DOI
10.1109/PLASMA.1996.551492
Filename
551492
Link To Document