An accurate equivalent circuit for the clamped circular multiple-electrode PMUT with residual stress

Author

Sammoura, Firas ; Smyth, Katherine ; Sang-Gook Kim ; Liwei Lin

Author_Institution

Microsyst. Eng. Div., Masdar Inst. of Sci. & Technol., Abu Dhabi, United Arab Emirates

fYear

2013

fDate

21-25 July 2013

Firstpage

275

Lastpage

278

Abstract

In this work, an equivelent circuit model is analytically derived for a multiple electrode unimorph piezoelectric micromachined transducer (pMUT) including the influence of residual film stresses and electrical diaphragm tensioning, for the first time. The derived model is confirmed with finite element (FEM) simulation of a circular plate lead zirconate titanate based pMUT operating in air. With further use of the analytical model and FEM, a novel pMUT design consisting of two electrodes excited by opposite polarities is proposed and shown to improve transmission power efficiency and reduce second order harmonics.

Keywords

electrodes; equivalent circuits; finite element analysis; internal stresses; piezoelectric transducers; plates (structures); structural acoustics; thin films; FEM; accurate equivalent circuit model; circular plate; clamped circular multiple-electrode PMUT; electrical diaphragm tensioning; finite element simulation; multiple electrode unimorph piezoelectric micromachined transducer; novel pMUT design; opposite polarities; residual film stress; second order harmonics; transmission power efficiency; zirconate titanate based pMUT; Acoustics; Atmospheric modeling; Electrodes; Harmonic analysis; Integrated circuit modeling; Mathematical model; Ultrasonic transducers; Green´s function; harmonic imaging; lumped-element circuit model; pMUT; piezoelectric micromachined ultrasonic transducer; residual stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2013 IEEE International

Conference_Location

Prague

ISSN

1948-5719

Print_ISBN

978-1-4673-5684-8

Type

conf

DOI

10.1109/ULTSYM.2013.0071

Filename

6724765