Title :
High-Q photonic crystal cavities realised using deep ultraviolet lithography
Author :
Welna, K. ; Debnath, K. ; Krauss, T.F. ; O´Faolain, L.
Author_Institution :
Sch. of Phys. & Astron., Univ. of St. Andrews, St. Andrews, UK
Abstract :
Deep-ultraviolet lithography is essential for the mass production of silicon devices. To date, restrictions in the process have prevented the realisation of high-Q-factor optical resonators. This reported work demonstrates photonic crystal cavities with Q-factor values of ~200 000 using an optimised design.
Keywords :
elemental semiconductors; optical resonators; photonic crystals; silicon; ultraviolet lithography; Si; deep ultraviolet lithography; high-Q photonic crystal cavities; high-Q-factor optical resonators; silicon devices mass production;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2015.1120
