Title :
Performance of BAW resonators at cryogenic temperatures
Author :
Rocas, E. ; Collado, C. ; Mateu, J. ; Hueltes, A. ; Verdu, J. ; Booth, James C. ; Aigner, Robert
Author_Institution :
Univ. Politec. de Catalunya (UPC), Barcelona, Spain
Abstract :
In this work we go beyond the usual temperature range for commercial applications and explore the functioning of Bulk Acoustic Wave (BAW) resonators down to cryogenic temperatures, to get the whole picture at understanding the physical tendency of the main parameters with temperature. This can ensure the proper functioning for specific applications where the device is exposed to extreme temperature variations.
Keywords :
bulk acoustic wave devices; cryogenics; resonators; BAW resonators; bulk acoustic wave resonators; cryogenic temperatures; temperature variations; Calibration; Electrical resistance measurement; Resistance; Resonant frequency; Substrates; Temperature distribution; Temperature measurement; Bulk Acoustic Wave; cryogenic; resonator; temperature;
Conference_Titel :
Ultrasonics Symposium (IUS), 2013 IEEE International
Conference_Location :
Prague
Print_ISBN :
978-1-4673-5684-8
DOI :
10.1109/ULTSYM.2013.0426
