DocumentCode
3091407
Title
Performance of BAW resonators at cryogenic temperatures
Author
Rocas, E. ; Collado, C. ; Mateu, J. ; Hueltes, A. ; Verdu, J. ; Booth, James C. ; Aigner, Robert
Author_Institution
Univ. Politec. de Catalunya (UPC), Barcelona, Spain
fYear
2013
fDate
21-25 July 2013
Firstpage
1672
Lastpage
1675
Abstract
In this work we go beyond the usual temperature range for commercial applications and explore the functioning of Bulk Acoustic Wave (BAW) resonators down to cryogenic temperatures, to get the whole picture at understanding the physical tendency of the main parameters with temperature. This can ensure the proper functioning for specific applications where the device is exposed to extreme temperature variations.
Keywords
bulk acoustic wave devices; cryogenics; resonators; BAW resonators; bulk acoustic wave resonators; cryogenic temperatures; temperature variations; Calibration; Electrical resistance measurement; Resistance; Resonant frequency; Substrates; Temperature distribution; Temperature measurement; Bulk Acoustic Wave; cryogenic; resonator; temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium (IUS), 2013 IEEE International
Conference_Location
Prague
ISSN
1948-5719
Print_ISBN
978-1-4673-5684-8
Type
conf
DOI
10.1109/ULTSYM.2013.0426
Filename
6724807
Link To Document