Title :
Microwave acoustic properties of diamond single crystal as a substrate for High-overtone Bulk Acoustic Resonator
Author :
Sorokin, Boris P. ; Kvashnin, Gennagy M. ; Volkov, Alexander P. ; Bormashov, Vitaly S. ; Aksenenkov, Vitaly V. ; Kuznetsov, Mikhail S. ; Telichko, Arseny V. ; Gordeev, Georgy I.
Author_Institution :
Technol. Inst. for Superhard & Novel Carbon Mater. (TISNCM), Troitsk, Russia
Abstract :
The piezoelectric layered structure Me1/AlN/Me2/single crystalline diamond was developed. Acoustic properties of number the layered structures have been studied on microwave frequency band. The frequency dependence of quality factor was estimated as Q·f ≈ 5.6·1013. The pressure and temperature influence on the resonant frequency have been studied. First resonant overtones with Q ~ 2500 were observed on super high frequencies ~ 19.5 GHz.
Keywords :
acoustic emission; acoustic microwave devices; acoustic resonators; diamond; high-frequency effects; piezoelectric materials; C; Me1-AlN-Me2-single crystalline diamond; diamond single crystal; first resonant overtones; frequency dependence; high-overtone bulk acoustic resonator; microwave acoustic properties; microwave frequency band; piezoelectric layered structure; pressure influence; quality factor; resonant frequency; substrate; temperature influence; Acoustics; Diamonds; Films; III-V semiconductor materials; Resonant frequency; Substrates; Temperature dependence; AlN; HBAR; diamond single crystal; piezoelectric layered structure;
Conference_Titel :
Ultrasonics Symposium (IUS), 2013 IEEE International
Conference_Location :
Prague
Print_ISBN :
978-1-4673-5684-8
DOI :
10.1109/ULTSYM.2013.0429
