Title :
Infrared-Light Interference System Based on Linnik-Type Interferometric Microscope for Three-Dimension Profile Measurement
Author :
Chou, Xiujian ; Niu, Kangkang ; Liu, Yi ; Xue, Chenyang ; Zhang, Wendong
Author_Institution :
Key Lab. of Instrum. Sci. & Dynamic Meas., North Univ. of China, Taiyuan, China
Abstract :
Infrared-light interference system for three-dimension profile measurement is proposed in this paper. The measurement system comprises infrared-light halogen source, linnik-type interferometric microscope, infrared-light InGaAs CCD array camera and ceramic piezo. With transmission to GaAs wafer, measured three-dimension profile and steps heights of microstructure are highly consistent with the results obtained from famous commercial instrument MSA 400 via Stoilov phase-stepping algorithm. The system has widely potential applications in the field of MEMS, such as reconstructing the internal profile measurement of encapsulation devices and analyzing the quality evaluation of bonding interface based on semiconductor materials.
Keywords :
CCD image sensors; III-V semiconductors; gallium arsenide; indium compounds; infrared sources; light interferometry; optical microscopy; spatial variables measurement; GaAs; GaAs wafer; InGaAs; Linnik-type interferometric microscope; MEMS; Stoilov phase-stepping algorithm; bonding interface; ceramic piezo; encapsulation devices; infrared-light CCD array camera; infrared-light halogen source; infrared-light interference system; internal profile measurement; microstructure; semiconductor materials; three-dimension profile measurement; Gallium arsenide; Interference; Microscopy; Optical interferometry; Optimized production technology; Semiconductor device measurement; Thickness measurement; Stoilov phase-stepping algorithm; infrared-light interference system; three-dimension profile;
Conference_Titel :
Pervasive Computing Signal Processing and Applications (PCSPA), 2010 First International Conference on
Conference_Location :
Harbin
Print_ISBN :
978-1-4244-8043-2
Electronic_ISBN :
978-0-7695-4180-8
DOI :
10.1109/PCSPA.2010.160
