DocumentCode
3092602
Title
Complex monolithic arrays: Some aspects of design and fabrication
Author
Narud, J.A. ; Phillips, C.D. ; Seelbach, W.C.
Author_Institution
Motorola, Inc., Phoenix, Arizona
fYear
1967
fDate
23-25 Oct. 1967
Firstpage
303
Lastpage
308
Keywords
Electronics industry; Fabrication; Force measurement; Integrated circuit interconnections; Large scale integration; Large-scale systems; Manufacturing; Monolithic integrated circuits; Production systems; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Adaptive Processes, Sixth Symposium on
Conference_Location
Chicago, IL, USA
Type
conf
DOI
10.1109/SAP.1967.272989
Filename
4049756
Link To Document