DocumentCode :
3092602
Title :
Complex monolithic arrays: Some aspects of design and fabrication
Author :
Narud, J.A. ; Phillips, C.D. ; Seelbach, W.C.
Author_Institution :
Motorola, Inc., Phoenix, Arizona
fYear :
1967
fDate :
23-25 Oct. 1967
Firstpage :
303
Lastpage :
308
Keywords :
Electronics industry; Fabrication; Force measurement; Integrated circuit interconnections; Large scale integration; Large-scale systems; Manufacturing; Monolithic integrated circuits; Production systems; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Adaptive Processes, Sixth Symposium on
Conference_Location :
Chicago, IL, USA
Type :
conf
DOI :
10.1109/SAP.1967.272989
Filename :
4049756
Link To Document :
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