• DocumentCode
    3092602
  • Title

    Complex monolithic arrays: Some aspects of design and fabrication

  • Author

    Narud, J.A. ; Phillips, C.D. ; Seelbach, W.C.

  • Author_Institution
    Motorola, Inc., Phoenix, Arizona
  • fYear
    1967
  • fDate
    23-25 Oct. 1967
  • Firstpage
    303
  • Lastpage
    308
  • Keywords
    Electronics industry; Fabrication; Force measurement; Integrated circuit interconnections; Large scale integration; Large-scale systems; Manufacturing; Monolithic integrated circuits; Production systems; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Adaptive Processes, Sixth Symposium on
  • Conference_Location
    Chicago, IL, USA
  • Type

    conf

  • DOI
    10.1109/SAP.1967.272989
  • Filename
    4049756