Title :
Complex monolithic arrays: Some aspects of design and fabrication
Author :
Narud, J.A. ; Phillips, C.D. ; Seelbach, W.C.
Author_Institution :
Motorola, Inc., Phoenix, Arizona
Keywords :
Electronics industry; Fabrication; Force measurement; Integrated circuit interconnections; Large scale integration; Large-scale systems; Manufacturing; Monolithic integrated circuits; Production systems; Silicon;
Conference_Titel :
Adaptive Processes, Sixth Symposium on
Conference_Location :
Chicago, IL, USA
DOI :
10.1109/SAP.1967.272989