A CMOS analog integrated circuit for actuation and readout of a MEMS CO2 sensor

In this paper, we describe a system for actuation and readout of a MEMS CO₂ sensor based on a CMOS Analog Integrated Circuit. Typically, in such sensor system, two separate systems provide both the actuation and readout. This paper presents a system using one single PLL performing both task. This work extends the sensor system described in [1] and [2] and is motivated out of a low-cost and miniaturizing perspective. A protorype has been implemented, that verifies the concept and shows the possibilities of making a small and integrated CO₂ sensor system.