Title :
Silicon self-switching-device based logic gates operating at room temperature
Author :
Aberg, Markku ; Saijets, Jan ; Pursula, E. ; Prunnila, Mika ; Ahopelto, Jouni
Author_Institution :
VTT Information Technology, P.O. Box 1208, FIN-02044 VTT, Finland
Abstract :
This paper presents first functional operational results of logic gates based on Silicon nano scale self switching devices (SSDs) and side gated transistors (SGTs). The devices are manufactured with Silicon-on- Insulator (SOU technology and are operative in room temperature. The circuits show correct logic operation. The performance parameters are still short of practical values, but ways of bringing them to acceptable level for real applications are discussed.
Keywords :
CMOS technology; Dry etching; FETs; Fabrication; Logic circuits; Logic devices; Logic gates; Manufacturing; Silicon; Temperature;
Conference_Titel :
Norchip Conference, 2004. Proceedings
Conference_Location :
Oslo, Norway
Print_ISBN :
0-7803-8510-1
DOI :
10.1109/NORCHP.2004.1423817