Research on a simulation platform assisting analysis of the cluster tool

To predict the throughput of the cluster tool and simulate the system operation process, the paper develops a simulation platform, named as ClusterSim. ClusterSim provides the easy-to-use interface to accept user´s input about the cluster tool configuration. The results that ClusterSim runs include the wafer foundation period, the lot period, chamber utilization, and others. The output of ClusterSim is verified using Perkinson´s model. The result indicates this platform is valid. ClusterSim provides an effective tool for users to analyze the cluster tool performance and validate feasibility of some routine recipe.