• DocumentCode
    3095081
  • Title

    Pure shear horizontal SAW on langatate

  • Author

    Da Cunha, Maurício Pereira ; Malocha, Donald C.

  • Author_Institution
    Dept. of Electr. Syst. Eng., Sao Paulo Univ., Brazil
  • Volume
    1
  • fYear
    2000
  • fDate
    36800
  • Firstpage
    231
  • Abstract
    In this paper we discuss for the first time the characteristics of the shear horizontal (SH) mode on langatate, a trigonal class 32 substrate just like quartz, which exhibits this same symmetry type uncoupling for the Euler angles [0° θ 90°]. We present experimental results for phase velocity and coupling along the orientation with Euler angles [0° 132° 90°], noting that a phase velocity reduction of about 50% is observed when compared to 36° Y rotated quartz, thus leading to smaller STW devices than on quartz. Our experiments show that this mode has a deep penetration inside the substrate, in accordance with theoretical predictions. The existence of plate modes and reflections from the back surface, and the procedures used to significantly reduce these interferences are reported. We also include experimental results on the fractional change in frequency with respect to temperature (Δf/fo) and the temperature coefficient of delay, TCD, for the Euler angles [0° 132° 90°] orientation. Our experimental data, obtained from direct measurements on a SAW wafer, are in excellent agreement with theoretical analysis for the Euler angles [0° θ 90°] plane
  • Keywords
    gallium compounds; lanthanum compounds; piezoelectric materials; surface acoustic waves; Euler angle; La3Ga5.5Ta0.5O14; STW device; coupling coefficient; langatate substrate; phase velocity; shear horizontal SAW mode; temperature coefficient of delay; Delay; Frequency; Gratings; Interference; Metallization; Reflection; Resonator filters; Surface acoustic waves; Surface waves; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2000 IEEE
  • Conference_Location
    San Juan
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-6365-5
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2000.922546
  • Filename
    922546