DocumentCode :
3095095
Title :
A minimal diffraction cut of quartz for high performance SAW filters
Author :
Abbott, Benjamin P. ; Solie, Leland
Author_Institution :
Sawtek Inc., Apopka, FL, USA
Volume :
1
fYear :
2000
fDate :
36800
Firstpage :
235
Abstract :
Diffraction has long been a limiting factor in implementing high performance SAW filters on ST-quartz. A minimal diffraction Quartz cut would find significant interest in the SAW industry. By proper selection of the Euler angles, the effects of diffraction may be minimized while simultaneously maintaining near zero power flow angle (PFA) and temperature coefficient of frequency (TCF). Using this approach, a new orientation of quartz has been identified. The resulting optimal region of Euler angles is (-5° to +5°, 37° to 46°, 20° to 26°). Doubly rotated wafers can introduce additional significant variations in the manufacture of SAW devices. Therefore a more restricted, but potentially more useful, range of Euler angles is (0°, 40° to 46°, 20° to 26°). A nominal solution is (0°, 43°, 23.7°) Over this range the coupling coefficient is approximately 15% greater than that of ST-quartz. Therefore, while maintaining near zero PFA and room temperature TCF, and slightly improved coupling, the effects of diffraction have been dramatically reduced. The theoretical background and experimental results of this development are presented. Additionally, a comparison of a SAW filter fabricated on ST-quartz and the new minimal diffraction orientation is presented
Keywords :
acoustic wave diffraction; crystal orientation; quartz; surface acoustic wave filters; Euler angle; SAW filter; SiO2; coupling coefficient; crystal orientation; minimal diffraction cut; power flow angle; quartz substrate; temperature coefficient of frequency; Communication industry; Computer errors; Diffraction; Frequency; Load flow; Manufacturing; SAW filters; Surface acoustic wave devices; Surface acoustic waves; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2000 IEEE
Conference_Location :
San Juan
ISSN :
1051-0117
Print_ISBN :
0-7803-6365-5
Type :
conf
DOI :
10.1109/ULTSYM.2000.922547
Filename :
922547
Link To Document :
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