Title :
A new triply rotated quartz cut for the fabrication of low loss SAW filters
Author :
Ballandras, Sylvain ; Briot, E. ; Solal, M. ; Steichen, W. ; Doisy, M. ; Hodé, J.M.
Author_Institution :
Univ. de Franche-Comte, Besancon, France
Abstract :
Analysis of the Quartz properties shows the existence of unexplored angular domains for which Rayleigh waves can be efficiently excited, exhibiting physical characteristics better than the ones of the (ST,X) cut. This paper presents a family of quartz cuts allowing significant improvements of SAW devices on Quartz. Experiments have been performed, confirming the above mentioned theoretical predictions. A filter built on this cut is presented showing the interest of the proposed crystal orientations
Keywords :
Rayleigh waves; crystal orientation; quartz; surface acoustic wave filters; Rayleigh wave; SAW filter; SiO2; crystal orientation; fabrication; triply rotated quartz cut; Acoustic waves; Beam steering; Fabrication; Frequency; Resonator filters; SAW filters; Surface acoustic wave devices; Surface acoustic waves; Surface treatment; Thermal stresses;
Conference_Titel :
Ultrasonics Symposium, 2000 IEEE
Conference_Location :
San Juan
Print_ISBN :
0-7803-6365-5
DOI :
10.1109/ULTSYM.2000.922548