Title :
Optimized application of antenna structures in a WLR monitoring program [IC testing]
Author :
Fazekas, Josef ; Asam, Wilhelm ; Von Hagen, Jochen
Author_Institution :
Semicond. Div., Siemens AG, Munich, Germany
Abstract :
When using antenna structures in a wafer-level reliability production monitoring program, we must take into account some restrictive conditions with regard to the available space for the required test structures and the time allowed for testing them. The purpose of this investigations was to find arguments for efficient selection of test structures and an appropriate choice of evaluation tests
Keywords :
integrated circuit reliability; integrated circuit testing; integrated circuit yield; monitoring; optimisation; production testing; IC test; WLR monitoring program; antenna structures; evaluation tests; optimized antenna test structures; test structure selection; test structure space; testing time; wafer-level reliability production monitoring program; Antenna measurements; BiCMOS integrated circuits; Boundary conditions; Building materials; CMOS process; Condition monitoring; Feedback; Flow production systems; Semiconductor device testing; Silicon;
Conference_Titel :
Integrated Reliability Workshop Final Report, 1997 IEEE International
Conference_Location :
Lake Tahoe, CA
Print_ISBN :
0-7803-4205-4
DOI :
10.1109/IRWS.1997.660277
