Title :
Interferometric investigation of SAW devices
Author :
Sääskilahti, Simo ; Knuuttila, Jouni ; Kaivola, Matti ; Aminoff, Carl Gustaf ; Salomaa, M.M.
Author_Institution :
Mater. Phys. Lab., Helsinki Univ. of Technol., Espoo, Finland
Abstract :
A Michelson laser interferometer is constructed for investigating surface acoustic waves in SAW devices. The interferometer can detect transversal surface vibrations whose amplitude is on the order of an Angstrom. The frequency bandwidth extends to 1 GHz. High-precision micromechanical translation stages allow surface scans with a resolution better than a micrometer
Keywords :
Michelson interferometers; light interferometry; measurement by laser beam; surface acoustic wave devices; vibration measurement; 1 GHz; 1 micron; Michelson laser interferometer; SAW devices; high-precision micromechanical translation stage; interferometric investigation; resolution; surface acoustic waves; surface scans; transversal surface vibrations; Acoustic beams; Acoustic signal detection; Acoustic waves; Frequency; Optical interferometry; Optical scattering; Optical surface waves; Semiconductor device measurement; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE
Conference_Location :
San Antonio, TX
Print_ISBN :
0-7803-3615-1
DOI :
10.1109/ULTSYM.1996.583953
