DocumentCode :
3096047
Title :
High coupling and zero TCF SH-SAW and SH-Boundary SAW using electrodes/Rotated Y-X LiTaO3 and SiO2/electrodes/Rotated Y-X LiTaO3
Author :
Yamanouch, Kazuhiko
Author_Institution :
Tohoku Univ., Sendai, Japan
fYear :
2013
fDate :
21-25 July 2013
Firstpage :
1061
Lastpage :
1064
Abstract :
In this paper, electrode Au/Rotated Y-X LiTaO3 and SiO2/electrode Au/ Y-X LiTaO3 of SH-SAW without propagation attenuations are analyzed using the mass loading effects of electrodes and dielectric layers. Au/Rotated Y-X LiTaO3 results show zero propagation attenuation and high coupling substrates of new cut angles with the TCF of - 20ppm/C at short surface. SiO2/ Au/ Y-X LiTaO3 results of SH-SAW surface wave show the zero propagation attenuation and high coupling substrates of new cut angles with the TCF of 0 ppm/C at SiO2 thickness of H/λ=0.15 at the short surface. Also, we show new cuts of the higher k2 and zero propagation attenuation substrate of Boundary SH-SAW with zero TCF. Also we show the experimental results of wide band and high Q resonators.
Keywords :
dielectric resonators; electrodes; gold; lithium compounds; piezoelectric materials; silicon compounds; surface acoustic wave devices; SH boundary SAW; SiO2-Au-LiTaO3; dielectric layers; electrodes; high Q resonators; high coupling substrates; mass loading effects; wide band resonators; zero TCF SH SAW; zero propagation attenuation; Attenuation; Electrodes; Gold; Lithium compounds; Substrates; Surface acoustic waves; Au Electrode; Boundary SH-SAW; High Q; LiTaO3; SH-SAW;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium (IUS), 2013 IEEE International
Conference_Location :
Prague
ISSN :
1948-5719
Print_ISBN :
978-1-4673-5684-8
Type :
conf
DOI :
10.1109/ULTSYM.2013.0272
Filename :
6725014
Link To Document :
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