High coupling and zero TCF SH-SAW and SH-Boundary SAW using electrodes/Rotated Y-X LiTaO3 and SiO2/electrodes/Rotated Y-X LiTaO3

Author

Yamanouch, Kazuhiko

Author_Institution

Tohoku Univ., Sendai, Japan

fYear

2013

fDate

21-25 July 2013

Firstpage

1061

Lastpage

1064

Abstract

In this paper, electrode Au/Rotated Y-X LiTaO₃ and SiO₂/electrode Au/ Y-X LiTaO₃ of SH-SAW without propagation attenuations are analyzed using the mass loading effects of electrodes and dielectric layers. Au/Rotated Y-X LiTaO₃ results show zero propagation attenuation and high coupling substrates of new cut angles with the TCF of - 20ppm/C at short surface. SiO₂/ Au/ Y-X LiTaO₃ results of SH-SAW surface wave show the zero propagation attenuation and high coupling substrates of new cut angles with the TCF of 0 ppm/C at SiO₂ thickness of H/λ=0.15 at the short surface. Also, we show new cuts of the higher k₂ and zero propagation attenuation substrate of Boundary SH-SAW with zero TCF. Also we show the experimental results of wide band and high Q resonators.

Keywords

dielectric resonators; electrodes; gold; lithium compounds; piezoelectric materials; silicon compounds; surface acoustic wave devices; SH boundary SAW; SiO₂-Au-LiTaO₃; dielectric layers; electrodes; high Q resonators; high coupling substrates; mass loading effects; wide band resonators; zero TCF SH SAW; zero propagation attenuation; Attenuation; Electrodes; Gold; Lithium compounds; Substrates; Surface acoustic waves; Au Electrode; Boundary SH-SAW; High Q; LiTaO3; SH-SAW;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2013 IEEE International

Conference_Location

Prague

ISSN

1948-5719

Print_ISBN

978-1-4673-5684-8

Type

conf

DOI

10.1109/ULTSYM.2013.0272

Filename

6725014