Title :
Surface acoustic wave properties of ZnO/DLC/Si(100) multilayer structure
Author :
Kim, Jin Yong ; Lee, Yong Eui ; Kim, Hyeong Joan ; Yang, Hyung Kook ; Park, Jong Chul ; Kim, Young Jin
Author_Institution :
Sch. of Mater. Sci. & Eng., Seoul Nat. Univ., South Korea
Abstract :
We investigated SAW properties of ZnO/DLC/Si (100) multilayer structure. Surface smoothness and intensity ratio of sp3/sp 2 of DLC films were enhanced with increasing a substrate d.c. bias voltage. At condition of KH(ZnO)=0.837 and KH(DLC)=0.262, the velocity of 1st mode wave was about 5,614 m/sec which was higher than cut-off velocity of ZnO/Si(100) structure
Keywords :
acoustic materials; carbon; silicon; surface acoustic waves; zinc compounds; SAW properties; ZnO-C-Si; ZnO/DLC/Si(100) multilayer; diamond-like carbon film; intensity ratio; substrate DC bias voltage; surface acoustic wave velocity; surface smoothness; Acoustic waves; Magnetic films; Nonhomogeneous media; Optical films; Piezoelectric films; SAW filters; Semiconductor films; Surface acoustic waves; Voltage; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE
Conference_Location :
San Antonio, TX
Print_ISBN :
0-7803-3615-1
DOI :
10.1109/ULTSYM.1996.583982
