• DocumentCode
    309627
  • Title

    Thermal sensitivity of transverse waves on thin quartz plates

  • Author

    Ballandras, S. ; Briot, J.B. ; Martin, G.

  • Author_Institution
    CNRS, Univ. de Franche-Comte, Besancon, France
  • Volume
    1
  • fYear
    1996
  • fDate
    3-6 Nov 1996
  • Firstpage
    459
  • Abstract
    Resonator-like devices have been built on AT-cut and Z-cut quartz plates 140 microns thick. The operating frequency of these devices was in the frequency range 90-150 MHz. The thermal sensitivity has been measured by applying quasi-static thermal cycles to an oscillator using these devices as a resonator. Since many transverse modes can propagate on the plates, the different modes have been tested for each device. Temperature compensation has been found experimentally in an extended frequency range for the AT-cut device, with turnover temperature varying from 30°C to 0°C. Extremely high sensitivity has been found for the first mode of the Z-cut device (higher than 65 ppm/°C) but also higher order modes were found to be temperature compensated. To explain these results, a model has been developed based on the Tiersten-Sinha perturbation method (1979) and a theoretical model of unperturbed propagation
  • Keywords
    compensation; quartz; sensitivity; surface acoustic wave resonators; ultrasonic propagation; -20 to 70 C; 140 micron; 90 to 150 MHz; AT-cut quartz plates; SiO2; Tiersten-Sinha perturbation method; Z-cut quartz plates; extremely high sensitivity; operating frequency; oscillator; quasi-static thermal cycles; resonator-like devices; surface transverse waves; temperature compensation; thermal sensitivity; thin quartz plates; transverse mode propagation; turnover temperature; unperturbed propagation model; Frequency measurement; Geometry; Gratings; Oscillators; Perturbation methods; Predictive models; Strips; Temperature distribution; Temperature sensors; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE
  • Conference_Location
    San Antonio, TX
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-3615-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1996.584011
  • Filename
    584011