DocumentCode
309627
Title
Thermal sensitivity of transverse waves on thin quartz plates
Author
Ballandras, S. ; Briot, J.B. ; Martin, G.
Author_Institution
CNRS, Univ. de Franche-Comte, Besancon, France
Volume
1
fYear
1996
fDate
3-6 Nov 1996
Firstpage
459
Abstract
Resonator-like devices have been built on AT-cut and Z-cut quartz plates 140 microns thick. The operating frequency of these devices was in the frequency range 90-150 MHz. The thermal sensitivity has been measured by applying quasi-static thermal cycles to an oscillator using these devices as a resonator. Since many transverse modes can propagate on the plates, the different modes have been tested for each device. Temperature compensation has been found experimentally in an extended frequency range for the AT-cut device, with turnover temperature varying from 30°C to 0°C. Extremely high sensitivity has been found for the first mode of the Z-cut device (higher than 65 ppm/°C) but also higher order modes were found to be temperature compensated. To explain these results, a model has been developed based on the Tiersten-Sinha perturbation method (1979) and a theoretical model of unperturbed propagation
Keywords
compensation; quartz; sensitivity; surface acoustic wave resonators; ultrasonic propagation; -20 to 70 C; 140 micron; 90 to 150 MHz; AT-cut quartz plates; SiO2; Tiersten-Sinha perturbation method; Z-cut quartz plates; extremely high sensitivity; operating frequency; oscillator; quasi-static thermal cycles; resonator-like devices; surface transverse waves; temperature compensation; thermal sensitivity; thin quartz plates; transverse mode propagation; turnover temperature; unperturbed propagation model; Frequency measurement; Geometry; Gratings; Oscillators; Perturbation methods; Predictive models; Strips; Temperature distribution; Temperature sensors; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE
Conference_Location
San Antonio, TX
ISSN
1051-0117
Print_ISBN
0-7803-3615-1
Type
conf
DOI
10.1109/ULTSYM.1996.584011
Filename
584011
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