DocumentCode
3096596
Title
Acoustical-optical hybrid microscopy for characterization of thin polymer films
Author
Tohmyoh, Hironori ; Sakamoto, Yuta
Author_Institution
Dept. of Nanomech., Tohoku Univ., Sendai, Japan
fYear
2013
fDate
21-25 July 2013
Firstpage
711
Lastpage
712
Abstract
This paper describes an acoustical-optical hybrid microscopy which enables us to realize the optical microscope observation of thin polymer film together with the acquisition of the acoustic properties of the film. Transparent glass plate was used for this purpose and the acoustic resonance among the water, the film and the plate is observed and analyzed.
Keywords
acoustic measurement; acoustic resonance; optical microscopy; oxidation; polymer films; thin films; acoustic properties; acoustic resonance; acoustical-optical hybrid microscopy; thermal oxidation; thin polymer films; transparent glass plate; Acoustics; Glass; Microscopy; Optical films; Optical imaging; Optical microscopy; acoustic properties; acoustic resonance; glass plate; optical microscope image; polymer film;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium (IUS), 2013 IEEE International
Conference_Location
Prague
ISSN
1948-5719
Print_ISBN
978-1-4673-5684-8
Type
conf
DOI
10.1109/ULTSYM.2013.0183
Filename
6725042
Link To Document