Title :
Acoustical-optical hybrid microscopy for characterization of thin polymer films
Author :
Tohmyoh, Hironori ; Sakamoto, Yuta
Author_Institution :
Dept. of Nanomech., Tohoku Univ., Sendai, Japan
Abstract :
This paper describes an acoustical-optical hybrid microscopy which enables us to realize the optical microscope observation of thin polymer film together with the acquisition of the acoustic properties of the film. Transparent glass plate was used for this purpose and the acoustic resonance among the water, the film and the plate is observed and analyzed.
Keywords :
acoustic measurement; acoustic resonance; optical microscopy; oxidation; polymer films; thin films; acoustic properties; acoustic resonance; acoustical-optical hybrid microscopy; thermal oxidation; thin polymer films; transparent glass plate; Acoustics; Glass; Microscopy; Optical films; Optical imaging; Optical microscopy; acoustic properties; acoustic resonance; glass plate; optical microscope image; polymer film;
Conference_Titel :
Ultrasonics Symposium (IUS), 2013 IEEE International
Conference_Location :
Prague
Print_ISBN :
978-1-4673-5684-8
DOI :
10.1109/ULTSYM.2013.0183
