Title :
SAW resonators using electrostrictive effect
Author :
Alzuaga, Sebastien ; Daniau, W. ; Baron, T. ; Martin, G. ; Salut, Roland ; Ballandras, S. ; Defay, E.
Author_Institution :
Time & Freq. Dept., FEMTO-ST Inst., Besancon, France
Abstract :
We report on the study of tunable surface acoustic waves (SAW) resonators fabricated on SrTiO3 (STO) substrate. Linear electromechanical coupling (induced “piezoelectric” coupling) is realized through electrostriction effect by applying a strong electric bias field in addition to the small signal electric and mechanical fields. Resonators have been fabricated at 2.2 GHz, showing an interesting tunability for variable bandwith filters or controlled sources.
Keywords :
UHF filters; electric fields; strontium compounds; surface acoustic wave resonators; titanium compounds; SAW resonators; SrTiO3; controlled sources; electric bias field; electrostrictive effect; frequency 2.2 GHz; linear electromechanical coupling; mechanical fields; piezoelectric coupling; small signal electric fields; tunable surface acoustic waves resonators; variable bandwith filters; Electrodes; Electrostriction; Resonant frequency; Substrates; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium (IUS), 2013 IEEE International
Conference_Location :
Prague
Print_ISBN :
978-1-4673-5684-8
DOI :
10.1109/ULTSYM.2013.0193