The acoustic method of the noncontact determination of thin films conductivity

Author

Kuznetsova, I.E. ; Zaitsev, B.D. ; Anisimkin, V.I. ; Teplykh, A.A. ; Shikhabudinov, Alexander M. ; Kolesov, V.V. ; Yakunin, Valery G.

Author_Institution

Inst. of Radio Eng. & Electron., Moscow, Russia

fYear

2013

fDate

21-25 July 2013

Firstpage

1594

Lastpage

1597

Abstract

The paper is devoted to the development of noncontact acoustic method of the determination of thin film conductivity. The method is based on the registration of the changes in velocity and attenuation of acoustic waves in the piezoelectric plate due to placing the structure “film under study - dielectric substrate” on the certain distance from the plate. The limits of the measured values by the suggested method are determined. The theoretical data are compared with the results of the experiment.

Keywords

acoustic wave absorption; acoustic wave velocity; dielectric thin films; electrical conductivity; lithium compounds; nondestructive testing; permittivity; LiNbO₃; acoustic method; acoustic wave attenuation; acoustic wave velocity; dielectric substrate; noncontact determination; permittivity; piezoelectric plate; thin film conductivity; Conductivity; Dielectrics; Films; Lithium niobate; Permittivity; Silicon; SH0 wave.; acoustic noncontact method; piezoelectric plate; thin film conductivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2013 IEEE International

Conference_Location

Prague

ISSN

1948-5719

Print_ISBN

978-1-4673-5684-8

Type

conf

DOI

10.1109/ULTSYM.2013.0406

Filename

6725073