Title :
The acoustic method of the noncontact determination of thin films conductivity
Author :
Kuznetsova, I.E. ; Zaitsev, B.D. ; Anisimkin, V.I. ; Teplykh, A.A. ; Shikhabudinov, Alexander M. ; Kolesov, V.V. ; Yakunin, Valery G.
Author_Institution :
Inst. of Radio Eng. & Electron., Moscow, Russia
Abstract :
The paper is devoted to the development of noncontact acoustic method of the determination of thin film conductivity. The method is based on the registration of the changes in velocity and attenuation of acoustic waves in the piezoelectric plate due to placing the structure “film under study - dielectric substrate” on the certain distance from the plate. The limits of the measured values by the suggested method are determined. The theoretical data are compared with the results of the experiment.
Keywords :
acoustic wave absorption; acoustic wave velocity; dielectric thin films; electrical conductivity; lithium compounds; nondestructive testing; permittivity; LiNbO3; acoustic method; acoustic wave attenuation; acoustic wave velocity; dielectric substrate; noncontact determination; permittivity; piezoelectric plate; thin film conductivity; Conductivity; Dielectrics; Films; Lithium niobate; Permittivity; Silicon; SH0 wave.; acoustic noncontact method; piezoelectric plate; thin film conductivity;
Conference_Titel :
Ultrasonics Symposium (IUS), 2013 IEEE International
Conference_Location :
Prague
Print_ISBN :
978-1-4673-5684-8
DOI :
10.1109/ULTSYM.2013.0406
