A short gate length pseudomorphic HEMT process for mm wave applications

A number of important applications including radar warning sensors for automobiles and communication between the base stations of mobile telephone networks use or will use millimeter wave frequencies. This work, carried out in ESPRIT project 6016 “CLASSIC”, has established a technological basis for the mass production of semiconductor components for cheap transmit and receive modules operating at millimeter wave frequencies. The high frequency part of the equipment is the cost determining factor. In the project, a transistor technology has been developed so that the major part of the millimeter wave section of the equipment can be integrated onto one semiconductor chip