Title :
Optical design and signal processing for a microcrack detection system
Author :
Yang, Wen-Ren ; Li, Yu-Lin
Author_Institution :
Dept. of Electr. Eng., Changhua Univ. of Educ., Changhua, Taiwan
Abstract :
This paper presents optical design, proof-of-principle experiments, and post-signal processing for a wafer microcrack detection system. Cylindrical lens and Solid Immersion Lens (SIL) are used for the optical module. Near-field probe array is also investigated for future implementation. For post-signal processing, Probabilistic Neural Network (PNN) is used in order to identify vibration-induced deviation. Derived Short-Time Discrete Wavelet Transform (STDWT) is developed in order to identify microcrack.
Keywords :
crack detection; discrete wavelet transforms; electronic engineering computing; microcracks; neural nets; wafer-scale integration; cylindrical lens; near-field probe array; optical design; optical module; post-signal processing; probabilistic neural network; short-time discrete wavelet transform; solid immersion lens; vibration-induced deviation; wafer microcrack detection system; Lenses; Optical design; Optical filters; Optical refraction; Optical signal processing; Optical surface waves; Optical variables control; Probes; Stimulated emission; Vibrations; PNN; STDWT; microcrack;
Conference_Titel :
Industrial Electronics and Applications (ICIEA), 2010 the 5th IEEE Conference on
Conference_Location :
Taichung
Print_ISBN :
978-1-4244-5045-9
Electronic_ISBN :
978-1-4244-5046-6
DOI :
10.1109/ICIEA.2010.5515329
