DocumentCode :
309761
Title :
Contribution of a 3D numerical simulation to the design of micro-machined quartz microstructures
Author :
Tellier, C.R. ; Messaoudi, T. ; Leblois, T.G.
Author_Institution :
Lab. de Chronometrie, Electron. et Piezoelectr., Ecole Nat. Superieure de Mecanique et des Microtech., Besancon, France
fYear :
1996
fDate :
5-7 Mar 1996
Firstpage :
364
Lastpage :
369
Abstract :
This paper is an attempt to prove the interest of a 3D simulation for micromachining of quartz. For this purpose new results related to doubly rotated plates are discussed. The 3D simulation based on the tensorial model of dissolution constitutes a convenient computer aided design for masks patterns. However, care must be taken because, for quartz crystal, the major problem remains the accurate adjustment of the dissolution slowness surface
Keywords :
micromachining; 3D numerical simulation; anisotropic dissolution; computer aided design; doubly rotated plates; etching; hole structures; mask patterns; mesa structures; micromachined quartz microstructures; microstructure design; quartz micromachining; tensorial model of dissolution;
fLanguage :
English
Publisher :
iet
Conference_Titel :
European Frequency and Time Forum, 1996. EFTF 96., Tenth (IEE Conf. Publ. 418)
Conference_Location :
Brighton
ISSN :
0537-9989
Print_ISBN :
0-85296-661-X
Type :
conf
DOI :
10.1049/cp:19960076
Filename :
584889
Link To Document :
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