Title :
The influence of PcCu layer crystalline structure on the parameters of SAW gas sensors
Author :
Hechner, J. ; Wróbel, T.
Author_Institution :
Inst. of Electron. Mater. Technol., Warsaw, Poland
Abstract :
This paper presents some problems concerned with SAW NO2 sensors employing copper phthalocyanine (PcCu) as the chemical interface. We have investigated the influence of crystalline structure of PcCu coating on the sensor sensitivity of generated frequency. The experiments were carried out for SAW delay lines on STX quartz and 128° YX lithium niobate. It was found that for the investigated range of parameters the β-PcCu layer provides several times better sensor sensitivity and temperature stability of SAW delay line generation frequency than α-PcCu layer of the same mass. This is valid for both substrates used
Keywords :
surface acoustic wave sensors; LiNbO3; NO2; SAW delay lines; SAW gas sensors; STX quartz; copper phthalocyanine layer; delay line generation frequency; layer crystalline structure influence; organic semiconductor layer; response time; sensitivity; sensor parameters; temperature stability;
Conference_Titel :
European Frequency and Time Forum, 1996. EFTF 96., Tenth (IEE Conf. Publ. 418)
Conference_Location :
Brighton
Print_ISBN :
0-85296-661-X
DOI :
10.1049/cp:19960077
