Title :
Multi-frequency CMUT arrays for imaging-therapy applications
Author :
Kshirsagar, Abhijeet ; Chee, Ryan ; Sampaleanu, Alexander ; Forbrich, Alexander ; Rishi, Deepak ; Moussa, Walied ; Zemp, Roger J.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Alberta, Edmonton, AB, Canada
Abstract :
Novel multi-frequency Capacitive Micromachined Ultrasound Transducer (CMUT) arrays with interlaced low and high-frequency elements are investigated for novel imaging-therapy applications. Our interlaced CMUTs are designed with device dimensions smaller than operating wavelengths. This permits low- and high-frequency CMUT cells to be interlaced monolithically on a scale smaller than the array wavelengths. This dense interlacing scheme thus offers the promise of co-registered dual-frequency-band operation with minimal deleterious grating lobes and with maximal overlap of low- and high-frequency beams.
Keywords :
bioMEMS; biomedical transducers; biomedical ultrasonics; micromachining; ultrasonic therapy; capacitive micromachined ultrasound transducer; coregistered dual-frequency-band operation; dense interlacing scheme; high-frequency CMUT cells; high-frequency ultrasound beams; imaging-therapy applications; low-frequency CMUT cells; low-frequency ultrasound beams; multifrequency CMUT arrays; Acoustics; Electrodes; Etching; Imaging; Impedance matching; Transducers; Ultrasonic imaging; 2D arrays; 3D ultrasound imaging; CMUTs; MEMS;
Conference_Titel :
Ultrasonics Symposium (IUS), 2013 IEEE International
Conference_Location :
Prague
Print_ISBN :
978-1-4673-5684-8
DOI :
10.1109/ULTSYM.2013.0508
