Title :
Anomalous peaks in mass spectra; effects of pre-analysis dissociation and charge exchange events
Author :
Johnson, Ronald C.
Author_Institution :
Appl. Mater. Inc., Santa Clara, CA, USA
Abstract :
It is common to find a considerable number of peaks in a mass spectrum that do not correspond to easily identifiable species (e.g., mass 10 and mass 80 peaks in Argon spectra). Dissociation of molecular ions and charge exchange events prior to mass analysis can account for many of these anomalies. This paper presents a general method for calculating the expected, apparent masses of these ions
Keywords :
charge exchange; dissociation; ions; mass spectroscopic chemical analysis; Ar; charge exchange; dissociation; mass spectrum; molecular ion; Acceleration; Argon; Contamination; Equations; Ion beams; Linear approximation; Magnetic analysis; Magnetic fields; Particle beams; Voltage;
Conference_Titel :
Ion Implantation Technology. Proceedings of the 11th International Conference on
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-3289-X
DOI :
10.1109/IIT.1996.586145
