DocumentCode :
3098290
Title :
A Novel Six-DOF Electromagnetic Precision Positioner Utilizing Hybrid Magnetic and Fluid Mechanism
Author :
Huang, Sheng-Chih ; Hung, Shao-Kang ; Chen, Mei-Yung ; Lin, Chih-Hsien ; Fu, Li-Chen
Author_Institution :
Nat. Taiwan Univ., Taipei
fYear :
2007
fDate :
5-8 Nov. 2007
Firstpage :
822
Lastpage :
827
Abstract :
In this paper, we present a novel mechanism and system implementation of six de-gree-of-freedom (DOF) electromagnetic-actuating positioner. The design of a novel mechanism utilizes hybrid magnetic and fluid mechanism to achieve two goals: 1) sufficient damping, 2) balancing the weight of the carrier utilizing buoyancy of fluid and achieving low power consumption. The novel mechanism and electromagnetic actuators are combined and the overall dynamic model is also derived. The positioner presented herein shows a large travel range of 3 mm times 3 mm times 4 mm with a positioning resolution of plusmn10 mum, which is close to the limit of the equipped sensors. We demonstrate the satisfactory performance of the positioner, with precision, theoretical analysis and experimental results.
Keywords :
electromagnetic actuators; position control; damping; electromagnetic-actuating positioner; fluid buoyancy; fluid mechanism; hybrid magnetic; precision motion control; six degree-of-freedom; six-DOF electromagnetic precision positioner; Actuators; Coils; Damping; Energy consumption; Fasteners; Friction; Magnetic levitation; Magnetic liquids; Magnets; Stators; Hybrid magnetic and fluid mechanism; Positioner; Precision motion control;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Industrial Electronics Society, 2007. IECON 2007. 33rd Annual Conference of the IEEE
Conference_Location :
Taipei
ISSN :
1553-572X
Print_ISBN :
1-4244-0783-4
Type :
conf
DOI :
10.1109/IECON.2007.4460161
Filename :
4460161
Link To Document :
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