Title :
Universal dielectric for creation of miniature UHF electronic devices anodic alumina
Author_Institution :
Inst. of Electron., Acad. of Sci., Minsk, Byelorussia
Abstract :
The unique aluminum oxide technology and its product-anodic alumina (AA) substrates both with and without aluminum base-hold much promise for semiconductor and vacuum microelectronics applications. The basis for successful applications of AA as a ceramic dielectric in UHF electronics is their unique electrophysical properties, which are presented in this paper
Keywords :
UHF tubes; alumina; anodised layers; ceramics; dielectric thin films; vacuum microelectronics; Al2O3; UHF electronic device; anodic alumina; dielectric ceramic; vacuum microelectronics; Aluminum; Ceramics; Dielectric devices; Fabrication; Integrated circuit technology; Mechanical factors; Microelectronics; Production; Substrates; Temperature;
Conference_Titel :
Electronics and Radiophysics of Ultra-High Frequencies, 1999. International University Conference Proceedings
Conference_Location :
St Petersburg
Print_ISBN :
5-7422-0083-8
DOI :
10.1109/UHF.1999.787950
