Title :
Individual cell measuring method for FeRAM retention testing
Author :
Tanabe, N. ; Koike, H. ; Miwa, T. ; Yamada, J. ; Seike, A. ; Kasai, N. ; Toyoshima, H. ; Hada, H.
Author_Institution :
Syst. Devices & Fundamental Res., NEC Corp., Sagamihara, Japan
Abstract :
We propose a new testing methodology to predict the failure rate for long-term data retention of FeRAM chips. The individual retention time limit for each memory cell is determined by measuring the retention time dependence on the read signal voltage using a novel test system. From this experiment, we found that the retention time limit of each memory cell obeys a Gaussian distribution. We applied this method to the evaluation of 16 kbit FeRAM test chips, and successfully predicted the failure rates for long-term data retention time as the functions of temperature and writing voltage
Keywords :
Gaussian distribution; failure analysis; ferroelectric storage; integrated circuit reliability; integrated circuit testing; random-access storage; 16 kbit; FeRAM chips; FeRAM retention testing; FeRAM test chips; Gaussian distribution; failure rate prediction; failure rates; individual cell measuring method; individual retention time limit; long-term data retention; long-term data retention time; memory cell; read signal voltage; retention time dependence; retention time limit; test system; testing methodology; writing voltage; Ferroelectric films; Gaussian distribution; Nonvolatile memory; Random access memory; Semiconductor device measurement; System testing; Temperature; Time measurement; Voltage; Writing;
Conference_Titel :
Reliability Physics Symposium, 2001. Proceedings. 39th Annual. 2001 IEEE International
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-6587-9
DOI :
10.1109/RELPHY.2001.922876