Title :
High SRAM standby current due to the printing of spurious images
Author :
Tang, Shoou-yu ; Mims, Marc ; Cynkar, Tom ; Marcoux, Paul.J. ; Eaton, Dennis H.
Author_Institution :
Networking Solutions Div., Agilent Technol. Inc, Fort Collins, CO, USA
Abstract :
Photoemission microscopy of a 2 Mbit SRAM identified a physical pattern of quiescent current (IDDq) failures on the regular array of this circuit. The pattern of IDDq failures correlated almost exactly with identifying marks on the edge of the SRAM gate reticle. This discovery led to the detection of contamination of the photolithographic imaging optics that resulted in ghost images
Keywords :
SRAM chips; electric current; failure analysis; fault currents; integrated circuit reliability; integrated circuit testing; photolithography; reticles; 2 Mbit; IDDq failure pattern; IDDq failures; SRAM; SRAM gate reticle; SRAM standby current; ghost images; identifying marks; photoemission microscopy; photolithographic imaging optics contamination; physical pattern; quiescent current failures; regular circuit array; spurious image printing; Contamination; Light scattering; Optical scattering; Packaging; Particle scattering; Photoelectricity; Printing; Random access memory; Voltage; X-ray scattering;
Conference_Titel :
Reliability Physics Symposium, 2001. Proceedings. 39th Annual. 2001 IEEE International
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-6587-9
DOI :
10.1109/RELPHY.2001.922919
