Accurate and robust noise-based trigger algorithm for soft breakdown detection in ultra thin oxides

Author

Roussel, Philippe ; Degraeve, Robin ; Van den Bosch, Geert ; Kaczer, Ben ; Groeseneken, Guido

Author_Institution

IMEC, Leuven, Belgium

fYear

2001

fDate

2001

Firstpage

386

Lastpage

392

Abstract

Oxide breakdown is one of the most threatening failure mechanisms in integrated circuits. As the oxide thickness is decreased in the sub-5 nm range, the breakdown definition itself is no longer clear and its detection becomes problematic. A new algorithm for accurate and robust automatic triggering on soft breakdown (SBD) during constant voltage stress based on gate current noise increase is presented. Triggering on current spikes or pre-BD events is avoided. This test assures correct automatic SBD-detection in a wide range of stress conditions and various geometries, with an execution speed that provides acceptable time resolution

Keywords

MOS integrated circuits; MOSFET; dielectric thin films; electric breakdown; integrated circuit noise; integrated circuit reliability; integrated circuit testing; 5 nm; SiO₂-Si; automatic SBD-detection; automatic triggering; breakdown definition; breakdown detection; constant voltage stress; current spike triggering; execution speed; failure mechanisms; gate current noise; integrated circuits; noise-based trigger algorithm; oxide breakdown; oxide thickness; pre-BD events; soft breakdown; soft breakdown detection; stress conditions; time resolution; ultra thin oxides; Automatic testing; Carbon capture and storage; Electric breakdown; Failure analysis; Geometry; Integrated circuit noise; Joining processes; Low voltage; Noise robustness; Thermal stresses;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium, 2001. Proceedings. 39th Annual. 2001 IEEE International

Conference_Location

Orlando, FL

Print_ISBN

0-7803-6587-9

Type

conf

DOI

10.1109/RELPHY.2001.922931

Filename

922931