Title :
Accurate and robust noise-based trigger algorithm for soft breakdown detection in ultra thin oxides
Author :
Roussel, Philippe ; Degraeve, Robin ; Van den Bosch, Geert ; Kaczer, Ben ; Groeseneken, Guido
Author_Institution :
IMEC, Leuven, Belgium
Abstract :
Oxide breakdown is one of the most threatening failure mechanisms in integrated circuits. As the oxide thickness is decreased in the sub-5 nm range, the breakdown definition itself is no longer clear and its detection becomes problematic. A new algorithm for accurate and robust automatic triggering on soft breakdown (SBD) during constant voltage stress based on gate current noise increase is presented. Triggering on current spikes or pre-BD events is avoided. This test assures correct automatic SBD-detection in a wide range of stress conditions and various geometries, with an execution speed that provides acceptable time resolution
Keywords :
MOS integrated circuits; MOSFET; dielectric thin films; electric breakdown; integrated circuit noise; integrated circuit reliability; integrated circuit testing; 5 nm; SiO2-Si; automatic SBD-detection; automatic triggering; breakdown definition; breakdown detection; constant voltage stress; current spike triggering; execution speed; failure mechanisms; gate current noise; integrated circuits; noise-based trigger algorithm; oxide breakdown; oxide thickness; pre-BD events; soft breakdown; soft breakdown detection; stress conditions; time resolution; ultra thin oxides; Automatic testing; Carbon capture and storage; Electric breakdown; Failure analysis; Geometry; Integrated circuit noise; Joining processes; Low voltage; Noise robustness; Thermal stresses;
Conference_Titel :
Reliability Physics Symposium, 2001. Proceedings. 39th Annual. 2001 IEEE International
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-6587-9
DOI :
10.1109/RELPHY.2001.922931
