DocumentCode
3100004
Title
Impact of electrolyte deposition technique on resistive Pt/Ta2 O5 /Cu switch performance
Author
Shrestha, Pragya ; Verma, Mohini ; Kang, Yuhong ; Cheung, Kin P. ; Baumgart, Helmut ; Orlowski, Marius
Author_Institution
Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
fYear
2011
fDate
7-9 Dec. 2011
Firstpage
1
Lastpage
2
Abstract
Resistive memory is being considered for next-generation non-volatile memory due to the inherent simplicity, scalability and low cost [1, 2]. Additionally, these devices show potential to replace static random access memory (SRAM) as high performance switches for reconfigurable devices [3, 4]. These devices operate by changing resistance from high (Roff) to low (Ron) values in response to applied voltage due to the formation and rupture of a metal filament as shown in Figure 1.
Keywords
copper; electric resistance; electrolytes; platinum; random-access storage; switches; tantalum compounds; Pt-Ta2O5-Cu; electrolyte deposition technique; high performance switch; metal filament; next-generation nonvolatile memory; reconfigurable device; resistive memory; resistive switch performance; static random access memory; Copper; Reliability; Solids; Switches; USA Councils;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Device Research Symposium (ISDRS), 2011 International
Conference_Location
College Park, MD
Print_ISBN
978-1-4577-1755-0
Type
conf
DOI
10.1109/ISDRS.2011.6135283
Filename
6135283
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