DocumentCode
3100007
Title
Circuit theory based analysis of CMUT arrays with very large number of cells
Author
Kagan Oguz, H. ; Atalar, Abdullah ; Koymen, Hayrettin
Author_Institution
Electr. & Electron. Eng. Dept., Bilkent Univ., Ankara, Turkey
fYear
2013
fDate
21-25 July 2013
Firstpage
291
Lastpage
294
Abstract
We have recently developed a circuit theory based method to analyze large CMUT arrays and shown that mutual acoustic interactions significantly influence the transducer performance. We connect each cell in the array to a radiation impedance matrix that contains the mutual radiation impedance between every pair of cells, in addition to their self radiation impedances. However, efficient analysis of very large arrays is challenging, which may become computationally cumbersome. To partition the problem, we electrically drive a single element in the array and keep the rest undriven but biased and with their electrical ports terminated with a load. The radiation impedance matrix can be partitioned and rearranged to represent these loads in a reduced form. In this way, only the driven element can be simulated by coupling its cells through this reduced impedance matrix. This method considerably reduces the number of cells and the size of the original radiation impedance matrix at the expense of calculating the inverse of a large complex symmetric matrix.
Keywords
capacitive sensors; circuit theory; micromachining; microsensors; ultrasonic transducer arrays; CMUT arrays; capacitive micromachined ultrasonic transducers; circuit theory based analysis; electrical ports; large complex symmetric matrix; mutual acoustic interactions; mutual radiation impedance; original radiation impedance matrix; self-radiation impedance; transducer performance; very large cell number; Acoustic arrays; Acoustics; Circuit theory; Equivalent circuits; Impedance; Integrated circuit modeling; Symmetric matrices;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium (IUS), 2013 IEEE International
Conference_Location
Prague
ISSN
1948-5719
Print_ISBN
978-1-4673-5684-8
Type
conf
DOI
10.1109/ULTSYM.2013.0075
Filename
6725211
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