• DocumentCode
    3100007
  • Title

    Circuit theory based analysis of CMUT arrays with very large number of cells

  • Author

    Kagan Oguz, H. ; Atalar, Abdullah ; Koymen, Hayrettin

  • Author_Institution
    Electr. & Electron. Eng. Dept., Bilkent Univ., Ankara, Turkey
  • fYear
    2013
  • fDate
    21-25 July 2013
  • Firstpage
    291
  • Lastpage
    294
  • Abstract
    We have recently developed a circuit theory based method to analyze large CMUT arrays and shown that mutual acoustic interactions significantly influence the transducer performance. We connect each cell in the array to a radiation impedance matrix that contains the mutual radiation impedance between every pair of cells, in addition to their self radiation impedances. However, efficient analysis of very large arrays is challenging, which may become computationally cumbersome. To partition the problem, we electrically drive a single element in the array and keep the rest undriven but biased and with their electrical ports terminated with a load. The radiation impedance matrix can be partitioned and rearranged to represent these loads in a reduced form. In this way, only the driven element can be simulated by coupling its cells through this reduced impedance matrix. This method considerably reduces the number of cells and the size of the original radiation impedance matrix at the expense of calculating the inverse of a large complex symmetric matrix.
  • Keywords
    capacitive sensors; circuit theory; micromachining; microsensors; ultrasonic transducer arrays; CMUT arrays; capacitive micromachined ultrasonic transducers; circuit theory based analysis; electrical ports; large complex symmetric matrix; mutual acoustic interactions; mutual radiation impedance; original radiation impedance matrix; self-radiation impedance; transducer performance; very large cell number; Acoustic arrays; Acoustics; Circuit theory; Equivalent circuits; Impedance; Integrated circuit modeling; Symmetric matrices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium (IUS), 2013 IEEE International
  • Conference_Location
    Prague
  • ISSN
    1948-5719
  • Print_ISBN
    978-1-4673-5684-8
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2013.0075
  • Filename
    6725211