Title :
Mass-transported efficient microlenses in GaAs and GaP for integration with high-power diode lasers
Author :
Liau, Z.L. ; Walpole, J.N. ; Mull, D.E. ; Hovey, D.L. ; DiNatale, W.F.
Author_Institution :
Lincoln Lab., MIT, Lexington, MA, USA
fDate :
31 Oct-3 Nov 1994
Abstract :
We describe the successful fabrication of the first mass-transported microlenses in GaAs, suitable for monolithic integration with lasers. We also describe a novel two-sided microlens in a GaP substrate, designed for high collection efficiency from a tapered laser and direct coupling to a single-mode fiber
Keywords :
laser accessories; GaAs; GaP; collection efficiency; direct coupling; fabrication; high-power diode lasers; mass transport; microlenses; monolithic integration; single-mode fiber; tapered laser; Diode lasers; Etching; Fiber lasers; Gallium arsenide; Laboratories; Lenses; Microoptics; Optical coupling; Optical design; Solids;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1994. LEOS '94 Conference Proceedings. IEEE
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-1470-0
DOI :
10.1109/LEOS.1994.586894
