Title : 
Electromagnetic analysis of an on-chip spiral inductor in the millimeter-wave band
         
        
            Author : 
Sumida, T. ; Hirano, Takuichi ; Okada, Kenichi ; Hirokawa, Jiro ; Ando, Makoto
         
        
            Author_Institution : 
Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Tokyo, Japan
         
        
        
        
        
        
            Abstract : 
The electromagnetic (EM) modeling and EM simulation technique are discussed for an on-chip spiral inductor in the millimeter-wave band. An excitation modeling with a de-embedding technique using thru and line patterns was discussed in this paper. Simulate results with several excitation models were compared with measured one. It was found that the influence of excitation model is not small and it should be appropriately modeled in the EM simulation. The calculated reflection including pads is closer to the measured one.
         
        
            Keywords : 
CMOS integrated circuits; electromagnetic wave propagation; inductors; millimetre wave integrated circuits; CMOS substrate; EM simulation technique; de-embedding technique; electromagnetic modeling; excitation model; millimeter wave band; on-chip spiral inductor; Frequency measurement; Inductors; Semiconductor device measurement; Silicon; Spirals; System-on-a-chip; Transmission line measurements; CMOS substrate; De-Embedding; Electromagnetic modeling; Millimeter-wave; Spiral inductor;
         
        
        
        
            Conference_Titel : 
Microwave Conference Proceedings (APMC), 2012 Asia-Pacific
         
        
            Conference_Location : 
Kaohsiung
         
        
            Print_ISBN : 
978-1-4577-1330-9
         
        
            Electronic_ISBN : 
978-1-4577-1331-6
         
        
        
            DOI : 
10.1109/APMC.2012.6421894